
- UV laser cut parts
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laser cut parts examplesMarch 10th, 2010
precision parts contract manufacturingMarch 8th, 2010Precision part tolerances are becoming increasingly tighter as designs become more complex. Laser cutting allows OEM’s to meet these demands and stay competitive when marketing their products. These processes are no longer fringe prototyping alone, but have become viable production options as well. Laser cutting services, such as A-laser, are able to meet the full complement of needs seen by our customers. Looking at our WIP today, the wide range of industries we touch is amazing. Laser micromachining of precision parts is growing each year and A-laser will stay at the forefront of these technologies. laser micromachining precision microwashersMarch 5th, 2010I haven’t referred to our microwasher capablities recently and just want a reminder out there that our laser cutting service maintains12 micron tolerances for these applications. Laser cutting microwashers provides a product that will fit just as the designers intended. As always, we are limited to very thin metal parts as well as non metal parts. ITAR registering laser cutting servicesMarch 3rd, 2010A-Laser is in the final stages of ITAR registration for our laser cutting services. This accomplishment will enhance our services and procedures, while allowing our customers to add to the business they can pursue. Our laser cutting processes are ideal for these applications due to the quality and consistency of our products. This is another step in our continuing effort to remain one of the most well respected and sought after laser cutting services in the United States. Ultrafine structuring of flexible circuitsMarch 1st, 2010
Ultrafine str u c t u r i n g of flexible c i rc u i t s
The continuing trend towards miniaturisation requires the development of new cost-effective and environmentally friendly materials and processes for the electronics industry. The gap between chip production, now producing sub-0.2 ?m lines and spaces, and PCB and packaging, must inevitably shrink.
Dr. Dieter J. Meier, LPKF Laser & Electronics AG, Germany
Fig. 1 – A possible application for UV lasers – laser direct patterning (LDP) of circuit structures Fig. 2 – LPD polymer film on Si-wafer. A UV laser was used to produce ³30 ?m features 2
M ANUFACTURING ablation possible at a rate of 0.13?m /shot using a wavelength of 248nm (KrF laser). The resultant structured films can be used as alkaline as well as acid resists and can be etched (subtractive) or additively built-up (semiadditive). Another way to laser structure thin polymer films for lithographic applications in electronics manufacture an electrochemically synthesised 100nm thick polythiophene film that can be ablated by a He-Cd laser at 325nm. Polythiophene has proved to be chemically stable against all acids and dilute alkalis, and it seems that it may be used as a self-developed UV resist. Using the process, it is possible to produce 1.9-2.7?m grooves at a pitch of 20?m. Pd-doped polymer films laid onto polyimide substrate may also be laser patterned by using an electroless metallising process with copper as shown in fig. 3. This produces electroless metallisation process with Cu, Ni and Au allows further processing for the electronics industry. Thin metal films laid down on a polymer may also be patterned by a UV laser. Here, the UV radiation penetrates the metal film and cracks the chemical bonds at the metal-polymer interface. The resulting plasma plume lifts off the metal layer in a mini explosion. Due to the high photonic energy of the UV laser it is assumed that this process also includes thermal ablation A UV laser was used to structure thin Al/Zn-layers on polypropylene foils with an XeCl-laser (wavelength 308nm) 150?m structures using a fluence of 200mJ/cm spaces. [8] uses[9] and circuit tracks built up³20?m lines, and the[12] .[5], making it possible to produce2 and ³20 ?m lines and Laser direct patterning (LDP)
Fig. 4 shows the general idea for producing flexible circuits in just three steps. Given the foregoing results, it should be possible to produce flexible circuitry using LDP, and this article looks at the results of research into this potential use of laser technology [ 1 1 ] using a KrF UV laser source that “ima-
Fig. 3 – UV-patterned Pd-doped polymer film Fig. 4 – The production of flexible circuits in a 3-step LDP process
Additive build up
• electroless Cu • electroless Ni • Film with layer Laser structuring Mask electroless Au Fig. 5 – Laser ablation of flexible circuitry through a chromium mask Fig. 6 – Detail of a microcoil patterned with optimised power density Fig. 7 – 15 ?m (0.6 mil) ablated tracks compared with human hair
REPRINTED FROM PRINTED CIRCUIT EUROPE – 1 REPRINTED FROM PRINTED CIRCUIT EUROPE – 1 ST QUARTER 2001ST QUARTER 2001 3 M ANUFACTURING ges” the film through a chromium mask (see fig. 5). This process uses an adhesiveless flex polyimide substrate on which is a 15nm Cr tiecoat and a 50nm Cu seed layer that has been processed in a proprietary vacuum metallisation process by an experienced base materials manufacturer [10]. Results and discussion
Optical evaluation of the first laser ablated Cr/Cu metallisation indicated the need for extensive tests to determi - ne an optimum imaging power density, that varies between 150-350mJ/cm Figs. 6 and 7 show the results of using the optimised technology to produce circuits with 15 micron lines and spaces, and table 1 shows some pro c e s s parameters. 2. After ablation
Although commercial quality baths are used for the electroless metallisation of the laser- s t ru c t u re d substrates, special care is necessary for the activation of the first ultra-thin layers. Following the careful ultrasonic removal of the laser debris, cleaning agents should be used at low-concentrations to avoid damaging the layers. Electroless copper metallisation using an appropriate bath then selectively builds up at approx. 2?m/hour. T M M S M OTAL PROCESSING RANGE (INCHES) 8 X 8AX. LAYOUT DIMENSIONS (INCHES) 5,5 X 5,5IN. LINE AND SPACE WIDTH 15?m (0.6MIL)YSTEM RESOLUTION 2?m (0.08MIL)AX. THROUGHPUT 1.55 SQ. INCH/ SEC M W AX. LASER POWER (W) 50AVELENGTH (nm) 248 T ABLE 1 – PROCESS PARAMETERS FOR LDP PROCESS 2655.63nm 1327.81nm 0 nm 56 ?m 56 ?m 28 ?m 28 ?m 0 ?m 0 ?m
Fig. 8 – Additive build up with electroless copper (19 ?m line width)
R EFERENCES [1] C. Dunsky et al:. ”High Quality Microvia Formation with Imaged UV YAG Lasers”, Proceedings of the Techn. Conference, San Diego 2000, S 15-5-1 [2] C. Vaucher: “Direct Imaging: will it fly or not?”, PCB-Fab, June 2000, 28ff [3] R. Rhodes: “Laser Direct Imaging”, CircuiTree June 2000, 62ff [4] E. Tadic: “Haaresbreite Feinststrukturen für zukünftige Produktgestaltungen”, SMT Ausgabe 1-2/2000, 12ff [5] W. Ziegler et al.: “Ein Excimerlaser strukturiert metallbedampfte Folien”, F&M 101 (1993), 189ff [6] R. Srinivasan et al.: “Self-developing photoetching of poly(ethylene terephthalate) films by far-ultraviolet excimer laser radiation”, Appl. Phys. Lett. 41, 576,1982 [7] K. Suzuki et al.: “Polymer resist materials for excimer ablation lithography”, Applied Surface Science 127-129 (1998) 905-910 [8] T.K.S. Wong et al.: “Patterning of poly(3-alkylthiophene) thin films by direct-write ultraviolet laser lithography”, Mat. Science and Eng. B55 (1998) 71-78 [9] J. Kickelhain: “Untersuchungen zur additiven Herstellung flexibler Feinstleiterstrukturen durch Excimerlaserablation festhaftender, metallorganisch aktivierter Schichten auf Polyimidfilmen”, Dissertation, Rostock 1999 [10] T. Bergstresser et al.: “The Effect of Moisture on Peel Strength of Adhesiveless Polyimide Laminates”, Proceedings of the 5th Annual National Conference on Flexible Circuits, Denver, 1999 [11] D. J. Meier et al.: “Laser Structuring of Fine Lines”, Proceedings of the 5th Annual National Conference on Flexible Circuits, Denver, 1999 [12] J. Koo et al. : “Removal of thin films from substrates by laser induced explosion”, US-Pat. 4,081,653
4 REPRINTED FROM PRINTED CIRCUIT EUROPE – 1ST QUARTER 2001 M ANUFACTURING Summary
Copper layers applied to polyimide films by PVD processes to a maximum thickness of 50nm can be ablated and patterned with a UV laser machine. A system has been developed that is suitable for industrial use that allows the production of and spaces. Structures for flexible circuit applications can be produced by the additive build-up of functional layers. The advantages that this new technology brings to the production of fine line structures for HDI applications are as follows: ³15?m (0.6mil) lines • etching precision lines and spaces without • ³15?m geometries • no photo imaging • fewer process steps => cost reduction • reduced chemicals and waste • desired Now, as well as being used for microvia drilling and laser direct imaging, the UV laser can be used for laser patterning. The author believes that this will reduce the gap between thin film techniques and PCB production. tracks can be built up to 6?m as3 LPKF Laser and Electronics AG Osteriede 7 30827 Garbsen – Germany Tel.: +49 (0)5131 7095 0 Fax: +49 (0)5131 7095 90 E-mail: lpkf@lpkf.de Website: www.lpkf.de
A CKNOWLEDGEMENTS The author would like to thank Mr. T. Bergstresser (GOULD Electronics), Mr. A. Boenke (LPKF Laser & Electronics AG), Mr. C. Böker (Zeiss), Mr. L. Bruderreck (Technolab Berlin), Mr. T. Kohlmeier (Universität Hannover) and the company Enthone-OMI.
Applications for the LDP process
Figs. 9 to 12 illustrate some applications for the LDP process. Fig. 9 shows a detail of a microcoil with 15 micron lines and spaces, produced using LDP. Fig. 10 shows a printer head application with 12 micron lines and spaces. Fig. 11 shows a flexible interposer. This micropackaging (Chip Size packaging) application has 15 micron lines and spaces. Fig. 12 shows an LDP interposer. This was completed as a CSP demonstrator and has been tested successfully according to the general reliability test for electronic components.
Fig. 10 – Applications for the LDP process. High density interconnect (12 ?m lines and spaces) Fig. 11 – Applications for the LDP process. Flex interposer for CSPs (15 ?m lines and spaces) Fig. 9 – Microcoil (15 ?m lines and spaces) Fig. 12 – Laser-structured CSP flexible interposer application. This has been tested successfully Microvia forming using UV laserFebruary 26th, 2010? Microvia forming using UV laser By Bernd Lange, LPKF Laser & Electronics AG, Garbsen, Germany
The continuing trend of miniaturization in electronic packaging demands smaller and smaller structures in conductive materials such as copper, nickel and gold. Vias in PCB’s are becoming as small as 60?m and for packaging interposers and High Density Interconnect boards (HDI) the industry roadmaps predict microvias with 50?m to 30?m diameter for the near future.
An increasing number of reliable interconnections between the layers of HDI boards require smaller microvias and higher quality standards for the forming process of microvias. For reliable interconnection the main requirements to microvias are: • Clean vias without residue • No delamination of copper and substrate • Tapered sidewalls without undercut • Big land diameter for robust interconnection to the inner layer • No perforation of the inner layer ? There are primarily four methods of microvia formation: • Mechanically drilled vias • Photo via formation / etching • Plasma-etching • Laser ablated vias ? Mechanical drilling is well known to the PCB community and the machine providers try hard to control the drilling depth in order to qualify their machines for blind via formation. Nevertheless this method is limited by throughput and efficiency as well as by its accuracy especially when it comes to glass-fiber reinforced materials. Photo via forming process is limited to photo imageable dielectrics. The expose and etch reliability, low copper adhesion and changing dielectric thickness together result in low yield. This method is usually not economical for small and mid size board houses. Plasma etching is also limited to certain substrates and requires substantial capital investment, which makes it only attractive for very high volume production. The quality of the micro vias is a function of the exact process control. It is not surprising that laser ablation with its flexibility and versatility quickly became the leading method for microvia forming. Two types of lasers are generally suitable to perform well in this field although they have very different characteristics and applications.
CO2 Laser
CO2 lasers are emitting infrared light with a wavelength between 9.3?m to 10.6?m.CO2 lasers are primarily used to drill bare substrates due to their inability to cut through copper. Recent developments of special absorption foils should also allow the ablation of very thin copper layers eventually. CO2 lasers are available with a wide range of output power, providing the necessary margin for fast drill processing in circuit board substrates. As vias are becoming smaller another shortcoming in the use of CO2 lasers emerges. The relatively long wavelength limits the minimal focus diameter in a given working field area. The formation of vias with diameters less than 75?m reaches the physical limits of this technology. The practical use of CO2 lasers requires a long chain of process steps within very tight tolerances. The copper layer typically has to be opened by etching, which causes a number of additional alignment challenges. To address this the design usually needs to provide larger pads on the inner layer. Although CO2 lasers are perfectly capable to ablate organic substrates they can’t guarantee residue-free holes as the laser light reflects on the inner copper and thus reduces the energy absorption. This requires chemical desmear or plasma etching as another consecutive process step to clean the bottom of the via from eventual residue. In an attempt to remove all residues completely with a CO2 laser it requires so much laser energy that this typically results in under cutting and delamination.
UV Laser
The other type of laser used for micro via formation is a solid-state laser emitting ultraviolet light. Looking at the absorption spectra of copper, epoxy, polyimide and glass it shows that ultraviolet light with a wavelength of 355nm will be absorbed from all those materials. In addition this light will be emitted with very short high-power pulses. Precisely focused to a small spot the extreme high power density creates very concentrated plasma that allows pinpoint ablation of the material. This creates a number of significant advantages for the drilling of printed circuit boards. 1. Both copper and substrate can be drilled with the same laser using only one piece of equipment without the need of photochemical etching of the outer copper layer. 2. UV lasers are capable of removing the copper layer to expose the fiducials for proper alignment between drill pattern and artwork of the inner layers. ? 3. Microvias with superior quality, large and clean bottoms that are textured and won’t require desmearing. 4. The energy exposure in a very small spot for a very short time limits heat spread-out to the dill hole’s environment. This also reduces the danger of delamination of mushroom shaped holes. 5. UV lasers have a very small focus. This allows creating of microvias with diameters as small as 30?m with a high aspect ratio. 6. UV lasers allow production of “stacked vias” that connect three layers of the board with one another. ? Other benefits of UV laser formation of microvias are: 1. The excellent alignment to the inner layer circuitry by using fiducials on the inner layer allows the use of smaller land pads. 2. The capability to form stacked vias, connecting three layers reduces the SBU steps. ?
New Challenges
Recently HDI circuits were used mostly in consumer handheld devices. RCC foils are perfectly capable of being laser drilled and meeting the performance requirements of such products. The automotive and computer industry’s demands for HDI PCBs with extended temperature range and superior mechanical stability requires microvias formed in reinforced materials. Woven glass fibers bedded in epoxy provide the necessary material characteristics but they are also more difficult to drill with lasers because of their inhomogeneous absorption of laser light. The glass has a higher absorption threshold than the epoxy and it also has a relatively uneven distribution over the area.
New Possibilities
In the past most of the UV laser-drilling machines were limited by their laser output power and were very limited in their use with FR4 substrates. Resin coated copper (RCC) and similar non-reinforced materials were the materials of choice and numerous results of laser via formation in these materials were reported.
laser micromachining optoelectronic componentsFebruary 24th, 2010A-laser produces a number of gasket and spacers for a wide range of industries, but some of the more intersting components come from the optoelectronics market. This market pushes our laser cutting service in terms of tool development for various materials as well as design. Our laser operators know their laser equipment inside and out in order to meet the requirements of the most demanding customers. We are committed to remaining a top level laser cutting service and look forward to the challenges any customer can throw our way. exposing copper traces and pads using UV laser cuttingFebruary 22nd, 2010A-laser has dialed in the process of skiving to copper in a manner that is quick enough to make it a useful production tool and with a level of cleanliness that other processes can’t match. UV skiving leaves virtually no carbon residue to cause shorts within circuits or contamination within a device. Laser cutting services have become an integral part of flexible circuit manufacturing processes and will continue to grow as companies gain a better understanding of the value added. A-laser has the right technology to support high tech companies in need of quality laser cutting services. UV laser cutting applicationsFebruary 20th, 2010Ours is a tricky business at times. Laser cutting services cover a very wide spectrum. For instance, our UV lasers are better than just about any other piece of equipment when it comes to cutting 10 mil polyimide with a 1 mil tolerance. not many other companies can process such a thin material and achieve nearly the tolerances that can be met with our lasers. therefore, the most important item for us is the ability to identify these opportunities and make ourselves as easy as possible to find. UV lasers are a rarity and UV lasers that can reach 7-8 watts of power are just that much more unique. A-laser will remain a laser cutting service focused on niche market production and achieving the highest quality possible. laser cutting blue steel using IR frequency lasersFebruary 17th, 2010Our laser cutting service customers have a range of needs and each material is selected for specific characteristics. Our laser operators are trained to recognize the variety of materials and adapt their laser settings to achieve the highest quality cuts possible. |
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